Oliver Rübenkönig
Zhenyu Liu
Jan G. Korvink
The IMTEK Mathematica Supplement (IMS) provides the basis for an Integrated Engineering Development Environment (IEDE). In this context we created an open source linear finite element modeling environment comprising the mechanics, fluidics, and a general differential operators domain. We split the operators from the geometry and shape functions, resulting in symbolic operators, which are well suited for finite element code generation, and fast numerical operators. In this article we show how we use the fast numerical operators for analyzing a microelectromechanical system device. A fast transient solution by means of model order reduction is presented. Finally, we conclude with a harmonic analysis.
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About the Authors
Oliver Rübenkönig is a Ph.D. student at the University of Freiburg, Germany. Rübenkönig received his Diploma in Microsystem Engineering in 2001. He uses Mathematica extensively in research and teaching and has developed many student exercises and some courses.
Zhenyu Liu is a research assistant at the University of Freiburg, Germany. Liu received his M.S. in 1997 and his Ph.D. in 2000 from the Department of Mechanical Engineering, Dalian University of Technology in China.
Jan G. Korvink obtained his M.Sc. in computational mechanics from the University of Cape Town in 1987 and his Ph.D. in applied computer science from the ETH Zurich in 1993. After his graduate studies, Korvink joined the Physical Electronics Laboratory of the ETH Zurich, where he established and led the Modeling Group. He then moved to the Albert Ludwig University in Freiburg, Germany, where he holds a Chair position in microsystem technology and runs the Laboratory for Microsystem Simulation. Currently, Korvink is dean of the Faculty of Applied Science. He has written more than 130 journal and conference papers in the area of microsystem technology and co-edits the review journal Applied Micro and Nanosystems. His research interests include the modeling, simulation, and low-cost fabrication of microsystems.
Oliver Rübenkönig
Zhenyu Liu
Jan G. Korvink
Lab for Simulation, Department of Microsystems Engineering ( IMTEK)
University of Freiburg
Germany
ruebenko@imtek.uni-freiburg.de
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